Atom scattering spectroscopy for surface structure and elemental analysis

The low energy ion scattering spectroscopy (LEIS) is a powerful method for surface crystal structure and elemental composition analysis of then topmost several layers of the crystal surface. However, analyses of insulator surfaces have been very difficult because of the electric charge-up caused by ions. To overcome the difficulties of charge up effects on insulator surfaces, we have developed a new type of surface instrument, TOFLAS-3000 (Time Of Flight Low energy Atom Scattering spectroscopy).